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MS7801 Pressure Sensor Die (0-1 bar)

MS7801 Pressure Sensor Die (0-1 bar) - click to enlarge
MS7801 Pressure Sensor Die (0-1 bar)
Model Number: 

MS7801

Brand: 

INTERSEMA

Categories:  Intersema

Product Description:

Features
1)
0 to 1 bar range (14.5 PSI)
2) High linearity (0.05% typical)
3) Absolute or Differential
4) Small Die size 1.84×1.98 mm
5) High Reliability, Low Cost

Applications
1) Altimeters
2) Barometers
3) Variometers

Description
The sensor element of the MS7801 consists of a silicon micro-machined membrane with a Pyrex? glass mounted under vacuum. Implanted resistors make use of the piezo-resistive effect. The absolute pressure sensor (MS7801A) carries a sealed vacuum reference cavity underneath the membrane whereas the differential sensor (MS7801D) has a hole in the Pyrex? glass at the backside of the sensor.

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