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Features
1) 0 to 7000 kPa range (70 bar or 1015 PSI)
2) Uncompensated pressure sensor die
3) Output span 310mV @ 5V
4) Temperature range -40°…+125°C
5) linearity 0.25% (typical)
6) Very small die size 1.72 x 1.58 mm (MS7970-A)
7) Low cost, high reliability
8) Absolute or differential pressure sensors

Applications
1) Engine controls
2) Diving computer

Description
The sensor element of the MS7970 consists of a silicon micro-machined membrane. Implanted resistors make use of the piezo-resistive effect to sense the membrane deflection and transform it in an electrical signal. This sensor, which has outstanding linearity and span values, is available in various configurations. The absolute pressure sensor employs a sealed vacuum reference cavity underneath the membrane. The Pyrex glass wafer used for this sealing has a thickness of 0.2 mm (MS7970-A_0.2) or 0.5 mm (MS7970-A_0.5). There are two gauge versions available: one with a drilled Pyrex glass (MS7970-D) and the other without Pyrex glass (MS7970-S).